Rate
Ask the Expert
Suggest an Application
Add to Favorites
Download eWorkflow
CreateParts List
Tell a Friend
PrintFind methods for your needs
Description
High pressure 18 MΩ-cm deionized water is used to clean tools and provide coolant during dicing operations of semiconductor devices. To minimize static charge buildup which may damage devices, some manufacturers "reionize" or aerate the deionized water with high purity carbon dioxide gas to increase the ionic content, thus reduce the resistivity and minimize static discharge damage. Here ppb anion concentrations are determined in carbonated deionized water using large loop injection (40 µL) onto IonPac AS15 column with a hydroxide gradient and suppressed conductivity detection.| Market: | Other |
| Keywords: | Formate, Organic acid, Carbonate, HPIC, large volume injection, anions, Nitrate, RFIC, ICS-4000, Nitrite, Chloride, Oxalate, Acetate, Sulfate, semiconductor, capillary IC, IonPac AS15 column, semiconductor carbonated water, gravimetric sample delivery |
| Matrix: | Carbonated semiconductor water |
| Author: | Yuki Kawahara and Terri Christison |
| Affiliation: | Thermo Fisher Scientific |
For Research Use Only. Not for use in diagnostic procedures.
