Semiconductor carbonated water

Instrument Type: IC

High pressure 18 MΩ-cm deionized water is used to clean tools and provide coolant during dicing operations of semiconductor devices. To minimize static charge buildup which may damage devices, some manufacturers "reionize" or aerate the deionized water with high purity carbon dioxide gas to increase the ionic content, thus reduce the resistivity and minimize static discharge damage. Here ppb anion concentrations are determined in carbonated deionized water using large loop injection (40 µL) onto IonPac AS15 column with a hydroxide gradient and suppressed conductivity detection.