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AU163: Determination of Trace Anions in Organic Solvents Using Matrix Elimination and Preconcentration
Description
Anion contamination introduced during manufacturing processes can ruin semiconductor devices, and therefore trace contaminants in solvents are a concern. This method successfully determines trace anions (high ng/L to low μg/L) in isopropyl alcohol, methanol, acetone, and n-methyl-2-pyrrolidone by matrix elimination. Results show improved method detection limits (MDLs) using 60% smaller sample injections. The method easily meets the Semiconductor Equipment and Materials International (SEMI®) specifications for solvents, with typically 100- to 2800-fold lower MDLs than the SEMI specifications.| Market: | Chemical |
| Keywords: | Formate, isopropanol, Methanol, solvent, anions in solvent, 2-Propanol, isopropyl alcohol, Acetone, n-Methyl-2-Pyrrolidone, IPA, AS-HV autosampler, IonPac UTAC-ULP1 concentrator column, NMP, anions, Nitrate, RFIC, matrix elimination, Nitrite, Chloride, Lactate, Acetate, Sulfate, Carbonate, IonPac AS18 column, TN 73892, TN73892 |
| Matrix: | Organic solvent |
| Author: | Terri Christison and Jeff Rohrer |
| Affiliation: | Thermo Fisher Scientific, Sunnyvale, CA USA |
For Research Use Only. Not for use in diagnostic procedures.
