AU163: Determination of Trace Anions in Organic Solvents Using Matrix Elimination and Preconcentration

Instrument Type: IC

Anion contamination introduced during manufacturing processes can ruin semiconductor devices, and therefore trace contaminants in solvents are a concern. This method successfully determines trace anions (high ng/L to low μg/L) in isopropyl alcohol, methanol, acetone, and n-methyl-2-pyrrolidone by matrix elimination. Results show improved method detection limits (MDLs) using 60% smaller sample injections. The method easily meets the Semiconductor Equipment and Materials International (SEMI®) specifications for solvents, with typically 100- to 2800-fold lower MDLs than the SEMI specifications.