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AU163: Determination of Trace Anions in Organic Solvents Using Matrix Elimination and Preconcentration Be the first to rate this application

race anions organic solvents

Description

Anion contamination introduced during manufacturing processes can ruin semiconductor devices, and therefore trace contaminants in solvents are a concern. This method successfully determines trace anions (high ng/L to low μg/L) in isopropyl alcohol, methanol, acetone, and n-methyl-2-pyrrolidone by matrix elimination. Results show improved method detection limits (MDLs) using 60% smaller sample injections. The method easily meets the Semiconductor Equipment and Materials International (SEMI®) specifications for solvents, with typically 100- to 2800-fold lower MDLs than the SEMI specifications.
Market: Chemical
Keywords: Acetate, Chloride, Formate, isopropanol, Lactate, Matrix Elimination, Methanol, Nitrate, Nitrite, RFIC, Sulfate, Carbonate, anions, solvent, anions in solvent, 2-Propanol, isopropyl alcohol, Acetone, n-Methyl-2-Pyrrolidone, NMP, IPA, AS-HV autosampler, IonPac AS18 column, IonPac UTAC-ULP1 concentrator column
Matrix: Organic solvent
Author: Terri Christison and Jeff Rohrer
Affiliation: Thermo Fisher Scientific
Uploaded on 2/27/2015.

For Research Use Only. Not for use in diagnostic procedures.