AU163: Determination of Trace Anions in Organic Solvents Using Matrix Elimination and Preconcentration
DescriptionAnion contamination introduced during manufacturing processes can ruin semiconductor devices, and therefore trace contaminants in solvents are a concern. This method successfully determines trace anions (high ng/L to low μg/L) in isopropyl alcohol, methanol, acetone, and n-methyl-2-pyrrolidone by matrix elimination. Results show improved method detection limits (MDLs) using 60% smaller sample injections. The method easily meets the Semiconductor Equipment and Materials International (SEMI®) specifications for solvents, with typically 100- to 2800-fold lower MDLs than the SEMI specifications.
|Keywords:||Acetate, Chloride, Formate, isopropanol, Lactate, Matrix Elimination, Methanol, Nitrate, Nitrite, RFIC, Sulfate, Carbonate, anions, solvent, anions in solvent, 2-Propanol, isopropyl alcohol, Acetone, n-Methyl-2-Pyrrolidone, NMP, IPA, AS-HV autosampler, IonPac AS18 column, IonPac UTAC-ULP1 concentrator column|
|Author:||Terri Christison and Jeff Rohrer|
|Affiliation:||Thermo Fisher Scientific|
For Research Use Only. Not for use in diagnostic procedures.