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AN131: Determination of Transition Metals at PPT Levels in High-Purity Water and SC2 (D-clean) Baths Be the first to rate this application

an131 determination transition metals at ppt levels highpurity water sc2 dclean baths

Description

Semiconductor cleaning solutions used to remove potentially damaging transition metal contamination are monitored to assess cleaning efficiency. Here trace concentrations (ng/L) of transition metals in semiconductor cleaning solutions and deionized water are separated using the strong complexing agent, pyridine-2,6-dicarboxylic acid (PDCA), on an IonPac CS5A column optimized with anion- and cation-exchange chemistry. Then a post-column derivitization agent, 4-(2- pyridilazo)resorcinol (PAR), is added to displace PDCA and to facilitate detection at 520–530 nm.
Market: Water Analysis
Keywords: copper, Zinc, absorbance, IonPac CS5A, iron, nickel, PAR, PDCA, post column, semiconductor, semiconductor cleaning bath, t-metals, Transition Metals, Visible Absorbance
Matrix: Semiconductor cleaning bath
Uploaded on 4/10/2015.

For Research Use Only. Not for use in diagnostic procedures.