AN131: Determination of Transition Metals at PPT Levels in High-Purity Water and SC2 (D-clean) Baths

Instrument Type: IC

Semiconductor cleaning solutions used to remove potentially damaging transition metal contamination are monitored to assess cleaning efficiency. Here trace concentrations (ng/L) of transition metals in semiconductor cleaning solutions and deionized water are separated using the strong complexing agent, pyridine-2,6-dicarboxylic acid (PDCA), on an IonPac CS5A column optimized with anion- and cation-exchange chemistry. Then a post-column derivitization agent, 4-(2- pyridilazo)resorcinol (PAR), is added to displace PDCA and to facilitate detection at 520–530 nm.

AN277: Fast and Sensitive Determination of Transition Metals in Power Industry Waters Using Ion Chromatography

Instrument Type: IC

This study describes the separation of iron (III), copper (II), nickel (II), and zinc (II) complexes with PDCA followed by postcolumn PAR reaction and absorbance detection at 530 nm. Surrogate samples include spiked deionized (DI) water (Boiling Water Reactor (BWR) surrogate) and spiked borated water containing lithium hydroxide with or without added zinc (Pressurized Water Reactor (PWR) surrogates).