AN131: Determination of Transition Metals at PPT Levels in High-Purity Water and SC2 (D-clean) Baths

Instrument Type: IC

Semiconductor cleaning solutions used to remove potentially damaging transition metal contamination are monitored to assess cleaning efficiency. Here trace concentrations (ng/L) of transition metals in semiconductor cleaning solutions and deionized water are separated using the strong complexing agent, pyridine-2,6-dicarboxylic acid (PDCA), on an IonPac CS5A column optimized with anion- and cation-exchange chemistry. Then a post-column derivitization agent, 4-(2- pyridilazo)resorcinol (PAR), is added to displace PDCA and to facilitate detection at 520–530 nm.