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AN119: Determination of an Anionic Fluorochemical Surfactant in a Semiconductor Etch Bath
Description
This AN describes the techniques, instrumentation, and method for determining low mg/L (ppm) amounts of the fluorochemical surfactant FC-93 in an etch bath (1 part hydrofluoric acid/6 parts ammonium fluoride) by IC. The surfactant is removed from the HF matrix by passing the sample through an IonPac NG1 column. The IonPac NG1 is a polymeric, reversed-phase column that quantitatively retains the surfactant but does not retain inorganic anions. The concentrated surfactant is then eluted from the IonPac NG1 onto an OmniPac PAX-500 column set and detected by chemically-suppressed conductivity.| Market: | Chemical |
| Keywords: | Online sample preparation, FC-93, OmniPac PAX-500, Suppressed conductivity detection, IonPac NG1, fluorochemical |
| Matrix: | Etch bath (1 part hydrofluoric acid/6 parts ammonium fluoride) |
| Author: | Mark Laikhtman and Jeff Rohrer |
| Affiliation: | Thermo Fisher Scientific |
For Research Use Only. Not for use in diagnostic procedures.
