Hydrogen peroxide is an essential chemical in the fabrication of integrated circuit and microcircuit devices. Maximum allowable contaminate levels for semiconductor grade hydrogen peroxide can be as low as <100 ppt (ng/L) per individual inorganic cation. This application uses an IonPac CS17 column to determine trace cations and amines in hydrogen peroxide with a large-loop injection. The CS17 column separates amines without the organic solvent eluent modifier needed for separating amines when using older cation-exchange ion-chromatography (IC) columns.

The work shown here demonstrates the use of IC-MS for the determination of six commonly found cations and selected amines on an IonPac CS12A-5µm column. Confirmatory information was obtained using full-scan MS spectra showing positively charged cation species and characteristic adduct patterns. Quantification was achieved using selected ion monitoring (SIM) acquisitions for each target analyte.

The determination of trace cationic contamination in processing acids (phosphoric, sulfuric, hydrofluoric) is important to the electronics industries to minimize corrosion. Here trace cationic contamination is determined in a 24% sulfuric acid sample. The acid sample is automatically neutralized through an electrolytic device, and then retained and concentrated onto a concentrator column. After eluting from the concentrator column, the µg/L cations are determined on an IonPac CS16 column using electrolytically generated MSA eluent and suppressed conductivity detection.

The determination of trace cationic contamination in processing acids (phosphoric, sulfuric, hydrofluoric) is important to the electronics industries to minimize corrosion. Here trace cationic contamination is determined in a 25% phosphoric acid sample. The acid sample is automatically neutralized through an electrolytic device, and then retained and concentrated onto a concentrator column. After eluting from the concentrator column, the µg/L cations are determined on an IonPac CS16 column using electrolytically generated MSA eluent and suppressed conductivity detection.

The determination of trace cationic contamination in processing acids (phosphoric, sulfuric, hydrofluoric) is important to the electronics industries to minimize corrosion. Here trace cationic contamination is determined in a 10% hydrofluoric acid sample. The acid sample is automatically neutralized through an electrolytic device, and then retained and concentrated onto a concentrator column. After eluting from the concentrator column, the µg/L cations are determined on an IonPac CS16 column using electrolytically generated MSA eluent and suppressed conductivity detection.