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TN45: Determination of Trace Anions in Hydrofluoric Acid, Ammonium Fluoride, and a Buffered Oxide Etchant

Instrument Type: IC

This work, an update to the original TN 45, reports an improved method for determining low concentrations of strong acid anions in HF. The method design also allows determination of low concentrations of strong acid anions in an HF/ammonium fluoride mixture (BOE), and ammonium fluoride. The ICE-AS6 column was replaced by the ICE-AS1 column because internal analysis showed that ICE-AS1 column had consistently low levels of sulfate, whereas there was a wide variation in sulfate concentrations from the ICE-AS6 column.