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Determination of ultratrace elements in semiconductor grade hydrochloric acid using the Thermo Scientific iCAP RQ ICP-MS
Description
To develop a method for the ultratrace determination of metals in semiconductor grade hydrochloric acid (HCl) using the Thermo Scientific™ iCAP™ RQ ICP-MS.Market: | Electronics & Semiconductors |
Keywords: | semiconductor, Cold plasma, KED, CCT, Hydrochloric acid |
Matrix: | Hydrochloric acid |
Author: | Tomoko Vincent |
Affiliation: | Thermo Fisher Scientific, Bremen, Germany |
For Research Use Only. Not for use in diagnostic procedures.