Determination of ultratrace elements in photoresist solvents using the Thermo Scientific iCAP TQ ICP-MS
DescriptionTo determine ultratrace metal concentrations in semiconductor grade PGMEA and NMP. To demonstrate the use of cold plasma and triple quadrupole technologies to reduce background equivalent concentrations (BEC) and detection limits (LOD). To demonstrate the use of the Thermo Scientific™ iCAP™ TQ ICP-MS for performing reproducible, ultratrace ng·L⁻¹ (ppt) measurements with reliable switching between multiple analysis modes (hot/cold plasma, single/ triple quadrupole) within a single measurement.
|Market:||Electronics & Semiconductors|
|Keywords:||NMP, semiconductor, Cold plasma, iCAP TQ, KED, Mass shift, TQ-O2, PGMEA, Photoresist|
|Matrix:||N-methyl-2-pyrrolidone (NMP), Propylene glycol methyl ether acetate (PGMEA)|
|Affiliation:||Thermo Fisher Scientific, Bremen|
For Research Use Only. Not for use in diagnostic procedures.