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Determination of ultratrace elements in photoresist solvents using the Thermo Scientific iCAP TQ ICP-MS Be the first to rate this application


To determine ultratrace metal concentrations in semiconductor grade PGMEA and NMP. To demonstrate the use of cold plasma and triple quadrupole technologies to reduce background equivalent concentrations (BEC) and detection limits (LOD). To demonstrate the use of the Thermo Scientific™ iCAP™ TQ ICP-MS for performing reproducible, ultratrace ng·L⁻¹ (ppt) measurements with reliable switching between multiple analysis modes (hot/cold plasma, single/ triple quadrupole) within a single measurement.
Market: Electronics & Semiconductors
Keywords: NMP, semiconductor, Cold plasma, iCAP TQ, KED, Mass shift, TQ-O2, PGMEA, Photoresist
Matrix: N-methyl-2-pyrrolidone (NMP), Propylene glycol methyl ether acetate (PGMEA)
Author: Tomoko Vincent
Affiliation: Thermo Fisher Scientific, Bremen
Uploaded on 2/5/2018.

For Research Use Only. Not for use in diagnostic procedures.