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AN72482: Determination of Urea in Ultrapure Water by IC-MS/MS
Description
Water used in the production of electronic devices, such as the components that make up computers and mobile phones, must be extremely pure. In particular, it must be free of ionic compounds. Typically, manufacturers aim to have the concentration of each ion below 1 μg/L. Another water contaminant that manufacturers seek to minimize is urea, which has been shown to cause problems with semiconductor production. This application note describes the development and execution of this method for determining urea in UPW.| Market: | Electronics & Semiconductors |
| Keywords: | mass spectrometry, MS/MS, semiconductor, HPW, IonPac CS16-Fast, UPW |
| Matrix: | High-purity water |
| Author: | Soon Fatt Lee, Fiona Teh Hui Boon, Chris Cheah Hun Teong, and Jeff Rohrer |
| Affiliation: | Thermo Fisher Scientific |
For Research Use Only. Not for use in diagnostic procedures.
