AU155: Determination of Cations and Amines in Hydrogen Peroxide by Ion Chromatography Using a RFIC (Reagent-Free) System

Instrument Type: IC

Hydrogen peroxide is an essential chemical in the fabrication of integrated circuit and microcircuit devices. Maximum allowable contaminate levels for semiconductor grade hydrogen peroxide can be as low as <100 ppt (ng/L) per individual inorganic cation. This application uses an IonPac CS17 column to determine trace cations and amines in hydrogen peroxide with a large-loop injection. The CS17 column separates amines without the organic solvent eluent modifier needed for separating amines when using older cation-exchange ion-chromatography (IC) columns.