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AU155: Determination of Cations and Amines in Hydrogen Peroxide by Ion Chromatography Using a RFIC (Reagent-Free) System
Description
Hydrogen peroxide is an essential chemical in the fabrication of integrated circuit and microcircuit devices. Maximum allowable contaminate levels for semiconductor grade hydrogen peroxide can be as low as <100 ppt (ng/L) per individual inorganic cation. This application uses an IonPac CS17 column to determine trace cations and amines in hydrogen peroxide with a large-loop injection. The CS17 column separates amines without the organic solvent eluent modifier needed for separating amines when using older cation-exchange ion-chromatography (IC) columns.Market: | Chemical |
Keywords: | dimethylamine, Ethylamine, IonPac CS17, Magnesium, Methylamine, Lithium, RFIC, Potassium, Calcium, trimethylamine, Sodium, integrated circuit, microcircuit, Hydrogen peroxide, semiconductor, Ammonium, TN 73892, TN73892 |
Matrix: | Hydrogen peroxide |
Author: | Sumate PengPumkiat, Weerapong Worawirunwong, and Jeffrey Rohrer |
Affiliation: | Thermo Fisher Scientific |
For Research Use Only. Not for use in diagnostic procedures.